After position adjustment, the tuning-fork transducer wafer in the magazine is taken out, and the frequency is changed by using a laser to peel off the thin metal layer while measuring ΔF to the target. The magazine is then used to store the modified wafer.

Target ProductTuning fork transducer wafer chips, 2-4 in.
Capacity4000p/h (0.9sec/p)
Frequency MeasurementMulti-channel counter Integrated oscillation circuit
Measurement resolution:
10 ppm
Measurement reproducibility:
20 ppm
ContactMultichannel probe cards
ID ReaderImage recognition device or barcode input
Wafer CorrectionPosition correction by image recognition devices
Transfer MethodExterior Dimension
Exterior Dimensions1400(W)x1600(D)x1700(H)