The image recognition system corrects each wafer after it has been removed from the wafer cassette and moved to the tray. You can choose from a variety of operating modes.
| Target | 2 - 4 inch wafers |
| Capacity | 60 sec/wafer (image processing time within 5 seconds) |
| Wafer Correction | Position correction by image recognition machine |
| External Dimensions | 1500(W)x950(D)x1850(H) |
